Working Pressure Induced Microstructure and Stress Evolution of Sputtered ZrN Coatings  

作　　者：Qi Zhengbing Yan Weili Hong Jinqing Zhu Fangping Sun Peng Wang Zhoucheng Wu Zhengtao Peng Dongliang Wu Chonghu 

机构地区：[1]Xiamen Univ, Coll Chem & Chem Engn, Xiamen 361005, Peoples R China [2]China Natl R&D Ctr Tungsten Technol, Xiamen 361005, Peoples R China

出　　处：《稀有金属材料与工程》2012年第S1期429-432,共4页Rare Metal Materials and Engineering

基　　金：National Key Technology R&D Program of China(2007BAE05B04);the National Natural Science Foundation of China(50825101)

摘　　要：The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated.XPS and XRD results reveal that all as-deposited coatings at varying working pressure are stoichiometric ZrN with cubic NaCl structure.A decrease in working pressure results in preferred orientation evolution from(111)to(200).This evolution is driven by kinetics processes,such as adatom surface migration and competitive grain growth,rather than by thermodynamic.This explanation is also supported by morphology characterization as the surface and cross-section morphologies transition from tapered shape and columnar structure to round and non-columnar(equiaxed)structure.The influence of working pressure on microstructure and residual stress evolution of magnetron sputtered ZrN coatings were systemically investigated.XPS and XRD results reveal that all as-deposited coatings at varying working pressure are stoichiometric ZrN with cubic NaCl structure.A decrease in working pressure results in preferred orientation evolution from(111)to(200).This evolution is driven by kinetics processes,such as adatom surface migration and competitive grain growth,rather than by thermodynamic.This explanation is also supported by morphology characterization as the surface and cross-section morphologies transition from tapered shape and columnar structure to round and non-columnar(equiaxed)structure.

关 键 词：ZRN COATING working pressure preferred ORIENTATION RESIDUAL stress MICROSTRUCTURE 

分 类 号：TG146.4[一般工业技术—材料科学与工程]