Application of Plasma Enhanced Chemical Vapor Deposition for Fingerprint Resistance  

作　　者：Lei Wenwen Chen Qiang Qi Fengyang Yang Lizhen Liu Zhongwei Wang Zhengduo 

机构地区：[1]Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China

出　　处：《稀有金属材料与工程》2012年第S1期433-438,共6页Rare Metal Materials and Engineering

基　　金：Beijing Natural Science Foundation(No.1112012),KM201110015008,KM201010015005 and PHR20110516

摘　　要：SiOx and diamond-like carbon(DLC)coatings as the fingerprint resistance and corrosion resistance layers were deposited by capacitively coupled plasma(CCP)-enhanced chemical vapor deposition powered by radio frequency(RF-PECVD).In here hexamethyldisiloxane(HMDSO)as monomer for SiOx coating,C2H2 as the carbon source for DLC growth precursor,and Ar as the dilution gas were utilized.The important factors affected fingerprint resistance was explored in detail.Besides,the corrosion resistant test on coatings and substrates were then examined by the potentiodynamic polarization measurement and salt-spray corrosion test,respectively.The chemical structure and composition of SiOx and DLC films were analyzed by FTIR,and the relationship between them and anti-corrosion property was discussed.The results show that the DLC coating demonstrates a better anti-fingerprint behavior than that of coated SiOx,especially in acidic solution environment.SiOx and diamond-like carbon(DLC)coatings as the fingerprint resistance and corrosion resistance layers were deposited by capacitively coupled plasma(CCP)-enhanced chemical vapor deposition powered by radio frequency(RF-PECVD).In here hexamethyldisiloxane(HMDSO)as monomer for SiOx coating,C2H2 as the carbon source for DLC growth precursor,and Ar as the dilution gas were utilized.The important factors affected fingerprint resistance was explored in detail.Besides,the corrosion resistant test on coatings and substrates were then examined by the potentiodynamic polarization measurement and salt-spray corrosion test,respectively.The chemical structure and composition of SiOx and DLC films were analyzed by FTIR,and the relationship between them and anti-corrosion property was discussed.The results show that the DLC coating demonstrates a better anti-fingerprint behavior than that of coated SiOx,especially in acidic solution environment.

关 键 词：SIOX and DLC COATINGS CCP FINGERPRINT RESISTANCE CORROSION RESISTANCE 

分 类 号：TG146.4[一般工业技术—材料科学与工程]