Influence of modulation ratio on structure and properties of nanoscale ZrB_2/ZrAlN multilayered coatings  

作　　者：LI DeJun 1,KANG YuanBin 1,DONG Lei 1,DENG XiangYun 1,LIU Hao 2 &SUN XueLiang 2 1College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387,China 2 Department of Mechanical&Materials Engineering,University of Western Ontario,London ON,Canada 

出　　处：《Science China(Technological Sciences)》2010年第3期772-775,共4页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant No.50872094);the International Collaboration Project of Tianjin Science and Technology Plan(Grant No.07ZCGHHZ01500);Key Project of Applied Basic and Advanced Technology Research Plan of Tianjin"Design and Synthesis of Superhard"Nanomuliti Layers with Boride Layers(2010)

摘　　要：ZrB2/ZrAlN multilayered coatings with various modulation ratios(t ZrB2:t ZrAlN)and constant modulation periods were prepared by magnetron sputtering system at room temperature.SEM,XRD,surface profiler and nano-indenter were employed to investigate the influences of tZ rB 2:tZrAlNon the microstructure and mechanical properties of the coatings.Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM.The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness(36.4 GPa)and critical fracture load(76.477 mN)with lower stress.The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties.ZrB2/ZrAlN multilayered coatings with various modulation ratios(t ZrB2:t ZrAlN)and constant modulation periods were prepared by magnetron sputtering system at room temperature.SEM,XRD,surface profiler and nano-indenter were employed to investigate the influences of tZ rB 2:tZrAlNon the microstructure and mechanical properties of the coatings.Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM.The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness(36.4 GPa)and critical fracture load(76.477 mN)with lower stress.The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties.

关 键 词：ZrB2/ZrAlN MULTILAYERED coating MAGNETRON sputtering modulation ratio NANOSCALE 

分 类 号：TB383.1[一般工业技术—材料科学与工程]