Research on the technology of femtosecond laser micromachining based on image edge tracing  

作　　者：Zhang DongShi Chen Feng Liu HeWei Wang XianHua Du Kai Si JinHai Hou Xun 

机构地区：[1]Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Shaanxi Key Lab Photon Technol Informat, Xian 710049, Peoples R China

出　　处：《Chinese Science Bulletin》2010年第9期879-883,共5页

基　　金：supported by the National Natural Science Foundation of China (Grant Nos. 60678011 and 10674107)

摘　　要：Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.

关 键 词：FEMTOSECOND laser IMAGE EDGE detection MICROMACHINING micro-pattern 

分 类 号：N[自然科学总论]