空间移相干涉仪的移相误差分析和测试  

Analysis and testing for phase-shifting error of a spatial phase-shifting interferometer

作　　者：左芬[1,2] 刘兆栋[2] 陈磊[2] 

机构地区：[1]淮阴师范学院物理与电子电气工程学院,淮安223300 [2]南京理工大学电子工程与光电技术学院,南京210094

出　　处：《东南大学学报（自然科学版）》2009年第S2期76-81,共6页Journal of Southeast University：Natural Science Edition

基　　金：淮阴师范学院青年人才支持计划资助项目(08QNZCK006)

摘　　要：分析研究了一种基于二维正交光栅分光的空间移相干涉仪的移相性能,指出移相器偏振片组中偏振单元的方位角偏差将直接产生2倍的移相误差,同时干涉图的空间一致性失调也会产生一定的移相误差.在根据原理方案搭建的实验系统中,分别采用测量4幅干涉图的对应消光位置法,以及作出干涉图同一行的光强拟合曲线之间的李萨茹图法,来测量出干涉图之间的实际移相量.结果表明,实验系统中经过空间一致性校准的干涉图之间的移相误差在±1.2°以内.The phase-shifting performance of a 2-dimensional grating based spatial phase-shifting interferometer is analyzed.The azimuth difference between two polarizers can bring double phase-shifting error.The spatial coherence maladjustment of interferograms also causes phase-shifting error.An experimental system based on the principal scheme is constructed.Its phase-shifting performance is tested by two methods.One is the method to test the extinction place of four phase-shifting interferograms and the other to make the Lissajous figures between two intensity sine fitting curves on the same row.The results show that after calibration the phase shifting errors of experimental system are all within ±1.2°.

关 键 词：干涉测量 空间移相 移相误差 

分 类 号：TH744.3[机械工程—光学工程]