偏压对Cr-DLC纳米复合薄膜表面形貌和结构的影响  

Effects of Substrate Bias Voltage on Surface Morphology and Structure of Cr-DLC Nanocomposite Films

作　　者：代伟[1] 吴国松[1] 汪爱英[1] 

机构地区：[1]中国科学院宁波材料技术与工程研究所,浙江宁波315201

出　　处：《材料工程》2009年第S1期44-47,共4页Journal of Materials Engineering

基　　金：宁波市自然科学基金(2007A610028)

摘　　要：采用线性离子束混合磁控溅射技术制备Cr-DLC纳米复合薄膜,并研究了衬底负偏压对薄膜表面结构和性能的影响。薄膜的成分和结构分别利用EDX和XRD进行表征;薄膜经稀硫酸腐蚀前后表面形貌采用荧光显微镜和原子力显微镜进行了分析;同时,利用接触角测试仪和电化学阻抗对薄膜的亲水性和电化学进行了研究。结果表明:薄膜结构为无定形态,含有少量Cr元素。在零偏压(接地)条件下所制备的Cr-DLC膜,掺入的Cr金属团簇或Cr/C化合物部分镶嵌在无定形碳膜中,暴露在薄膜表面外。经稀硫酸腐蚀后,形成"凹坑"和"针孔"。表面粗糙度变大,接触角(亲水性)变小。电化学腐蚀表现出很强的纯阻抗性;而在偏压条件下制备的薄膜,在稀硫酸腐蚀前后,表面形貌没有明显的变化。同时,薄膜腐蚀前后接触角变化不大,表现出良好的抗电化学腐蚀性能。偏压对Cr-DLC纳米复合薄膜表面形貌的影响可能与DLC膜"亚表面植入"生长模式和薄膜自溅射有关。the Cr-doped diamond-like carbon(Cr-DLC) nanocomposite films were prepared by a hybrid linear ion beam system composed of a DC rectangular sputtering source of Cr.The influence of bias voltage on the surface morphology and structure of the film has been studied.Cr concentration and structure of the films were determined by EDX and XRD respectively.Microscope and atomic force microscope show that the grounded samples presented some 'pits' and 'concave' after eroded by diluents vitriol.On the other hand,the biased samples had little changes after corrosion.The contact angle of the grounded samples had a great variety,while the biased one changed little.Those analyses above suggest that the Cr/C composite particles of the biased films in subsurface are covered with a very thin amorphous carbon layer.The ones of the grounded films are partially embedded in the amorphous carbon matrix and eroded in vitriol.

关 键 词：Cr-DLC纳米复合薄膜 表面腐蚀 微观结构 

分 类 号：V25[一般工业技术—材料科学与工程]