Fabrication of micro carbon pillar by laser-induced chemical vapor deposition  

作　　者：周健 罗迎社 李立君 钟琦文 李新华 殷水平 

机构地区：[1]College of Machinery and Electrical,Centre South University of Forestry and Technology [2]Institute of Rheological Mechanics and Material Engineering,Centre South University of Forestry and Technology [3]Department of Teaching Affair,Centre South University of Forestry and Technology

出　　处：《Journal of Central South University》2008年第S1期197-201,共5页中南大学学报（英文版）

基　　金：Project supported by Scientific Research Fund of Centre South University of Forestry and Technology;Project supported by Teaching Innovation Fund of Centre South University of Forestry and Technology

摘　　要：Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa,the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar.In the experiments,the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated,the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed.Based on experiment data,the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.Argon ion laser was used as the induced light source and ethane (C2H4) was selected as the precursor gas, in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa, the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar. In the experiments, the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated, the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed. Based on experiment data, the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.

关 键 词：LASER-INDUCED chemical vapor deposition(LCVD) GROWING rapid DIAMETER microcarbon. 

分 类 号：TN304.18[电子电信—物理电子学]