基于虚拟仪器的HBT器件自动测试系统  

Auto-Test System of HBT Device Based on Virtual Instruments

作　　者：欧阳思华[1] 武锦[1] 李艳奎[1] 刘新宇[1] 

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《半导体技术》2008年第S1期8-11,共4页Semiconductor Technology

摘　　要：由材料特性和结构特点所决定,异质结双极型晶体管(HBT)具有高的开关速度、截止频率、电流增益和输出功率。但是,在实际测量的过程中,涉及多台仪器间的协同工作,仪器的手动操作、测试数据的采集、保存和共享成为横亘在评估HBT器件性能间的一道屏障。在改进传统测试的基础上,通过搭建基于LAN的虚拟仪器构架,介绍了一种自动化整体评估HBT器件性能的方法。这套系统很好地解决了测试数据的快捷传输,实现了测试过程的自动化,加快了测试速度。Heterojunction bipolar transistor(HBT)possesses high switching speed,cut-off frequency,current gain and output power because of its material peculiarity and structure characte-ristic.However,in the course of actual measurement,some problems are big challenge to eva-luate the performance,such as working among instrument,manual operating,collecting,saving and sharing test data.On the base of improving traditional means,a way to realize on wafer HBT device automatic measured system was introduced via construct the virtual instrument system based on LAN.This system solves the transmission of data and realizes the automation of test and speeds up the process.

关 键 词：一键式测量 虚拟仪器 自动测试系统 磷化铟异质结双极型晶体管 

分 类 号：TN322.8[电子电信—物理电子学]