多皱纹纳米石墨片的制备及其工艺研究  

Synthesis of Wrinkles-Rich Carbon Nano Sheet

作　　者：刘卫华[1] 党涛[1] 朱长纯[1] 

机构地区：[1]西安交通大学电子与信息工程学院,西安710049

出　　处：《半导体技术》2008年第S1期383-385,389,共4页Semiconductor Technology

基　　金：国家"863"高技术研究发展计划(2008AA03A314);国家自然科学基金(60801022);西安应用材料创新基金(XA-AM-200710)

摘　　要：在500℃下,采用PECVD法在以玻璃为衬底的多种金属镀层上成功制备出纳米石墨片。SEM分析表明,不同催化剂层上生长的二维纳米石墨片在形态上存在显著区别。在所涉及的工艺参数范围内,Ni/Zn复合金属镀层上二维纳米石墨片的生长效率最高,且在部分区域具有碳纳米墙形貌特征。TEM分析表明,所生长的二维纳米石墨片具有大量皱纹,且皱纹具有指纹形的石墨层状结构。纳米尺度的皱纹随机分布于整个二维纳米石墨片中,与超薄石墨烯自然形成的皱褶存在显著区别。根据指纹形皱纹的最大层数估计,石墨片的厚度在10nm左右,这种多皱纹纳米石墨片反映了催化剂对二维石墨生长的影响。这种材料除了可作为场发射冷阴极外,在催化剂载体以及气敏传感器等领域都可能有重要应用。Carbon nano sheet were synthesized on catalyst coated glass by PECVD method at 500 ℃.The morphology of 2-D carbon nanostructures are quite different on different catalyst,and the growth ratio of carbon nano sheet on the Ni/Zn complex catalyst layer are significantly high than Ni and Ni/Co catalyst in the process condition.Carbon nano sheet in the form of nanowall are observed on the Ni/Zn coated samples.TEM analysis revealed the carbon nano sheets growing on the Ni/Zn coated samples are wrinkles-rich in internal structures.Layered structure of graphene are observed in the wrinkles,which is significant different from the folds or corrugates of ultra-thin graphene.The wrinkles of nanometer size randomly distributes in the whole carbon nano sheet.About 10 nm thickness of the nano sheets is estimated by the number of layers.Wrinkles-rich carbon nano sheet gives a direct prove of the effect of the catalyst on the growth carbon nano sheet.The carbon nano sheet is a good field emission material,and a promising candidate for catalyst support material and gas sensor material.

关 键 词：射频等离子增强化学气相淀积 碳纳米片 碳纳米墙 

分 类 号：TB383.1[一般工业技术—材料科学与工程]