INFRARED DETECTOR USING SUPERCONDUCTING YBa_2Cu_3O_7-δTHIN FILMS  

作　　者：WU Youyu YI XinjianWuhan Automotive Polytechnic UniversityHuazhong University of Science and Technology 

出　　处：《Journal of Wuhan University of Technology(Materials Science)》1999年第4期40-47,共8页武汉理工大学学报（材料科学英文版）

摘　　要：The patterning technologies and process order of high Tc(86K) super-conducting film bolometers have been studied. After the deposition, a conventional lithographic process was used to pattern the films with aqueous solution of HCl, and then the films were transferred into a tube furnace for annealing to form superconducting film. It eliminates the degradation of patterning process. The bolometric responsivity of approximately 34. 32 V/W is measured, and the detectivity is greater than 1. 62× 108cm · Hz1/2 · W-1, the noise equivalent powers NEP is 2. 1×10-9W.The patterning technologies and process order of high Tc(86K) super-conducting film bolometers have been studied. After the deposition, a conventional lithographic process was used to pattern the films with aqueous solution of HCl, and then the films were transferred into a tube furnace for annealing to form superconducting film. It eliminates the degradation of patterning process. The bolometric responsivity of approximately 34. 32 V/W is measured, and the detectivity is greater than 1. 62× 108cm · Hz1/2 · W-1, the noise equivalent powers NEP is 2. 1×10-9W.

关 键 词：BOLOMETER PATTERNING etching solu- tion YBa_2Cu_3O_7 δ superconducting films 

分 类 号：TB43[一般工业技术]