微电子CAD系统PC—SUPREM和PC—SEDAN及其应用研究  

PC-SUPREM PC-SEDAN AND ITS APPLICATIOH OF CAD SYSTEM MICROELECTRONICS

作　　者：孙广增[1] 

机构地区：[1]山东工业大学

出　　处：《济南大学学报（社会科学版）》1995年第1期79-82,共4页Journal of University of Jinan:Social Science Edition

摘　　要：微电子集成电路工艺模拟系统SUPREM及半导体器件特性模拟系统SEDAN是微电子CAD系统中的核心内容,也是我国微电子工业技术环节中的一个薄弱环节.本文较全面地介绍了微电子工艺模拟及半导体器件模拟的PC实用系统和有关应用方面的研究.特别是SUPREM同SEDAN的接口联机模拟,极大地增强了模拟信息量.最大限度地实施了以上两系统的模拟功能.PC-SUPREM and PC-SEDAN are the core of CAD system of microelectronics , are also the weak link of microelectronic industries in china. Some studies of author are discussed. Also, PC-SUPREM, PC-SEDAN and its application of microelectronic are overall introduced. Simulation for connection of SUPREM and SEDAN with computers is emphasized, so that amount of simulation information is extremely enhanced, and function of simulation of two svstems above is extremelv carrved out.

关 键 词：微电子 集成电路 工艺模拟 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术]