DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS  

作　　者：王小保 钱劲 张大成 

机构地区：[1]Institute of Microelectronics,Peking University,Beijing 100871,China [2]LNM,Institute of Mechanics,Chinese Academy of Sciences,Beijing 100080,China

出　　处：《Acta Mechanica Sinica》2004年第2期152-158,共7页力学学报（英文版）

基　　金：The project supported by the National "973" Project (TG1999033108);the National Natural Science Foundation of China (19928205,50131160739 and 10072068)

摘　　要：Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with the piezoresistors in order to measure the output response.The output voltage increases with increasing flow rate of air,obeying determined relationships.The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities.The sensor chip is manufactured with bulk-micromachining technologies,requiring a set of seven masks.Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with the piezoresistors in order to measure the output response.The output voltage increases with increasing flow rate of air,obeying determined relationships.The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities.The sensor chip is manufactured with bulk-micromachining technologies,requiring a set of seven masks.

关 键 词：micromachined flowmeters bulk-micromachining PIEZORESISTIVITY Wheatstone bridge 

分 类 号：TH814[机械工程—仪器科学与技术]