ANALYSIS OF NANO CHANNEL FORMATION IN QUARTZ CUBES BY LASER-INDUCED PROCESS  

作　　者：秦水介 李文荣 

机构地区：[1]Laboratory for Photoelectric Technology and Application,Guizhou University,Guiyang 550025,China Center for Micro and Nano Systems,The Chinese University of Hong Kong,Hong Kong SAR,China LNM,Institute of Mechanics,Chinese Academy of Sciences,Beijing 100080,China [2]Center for Micro and Nano Systems,The Chinese University of Hong Kong,Hong Kong SAR,China

出　　处：《Acta Mechanica Sinica》2004年第2期125-131,共7页力学学报（英文版）

基　　金：The project supported by the National Natural Science Foundation of China (50375031);the Hong Kong Research Grants Council (CUHK 4416/99E)

摘　　要：A novel laser processing technique was developed for making channels in the nano regime in this paper.A Nd:YAG laser was used to dry fabricate micro channels(25μm～100μm di- ameter)in a 1 cm^3 fused silica substrate by thermal-induced processing.By controlling the locations of these initiating micro channels on a silica cube,1D-controllable self-connecting nano fractures can be formed as rectangular channels.These nano channels are smooth and with extremely high aspect ratio(～10~4 depth to width ratio).A possible mechanism is proposed to explain the formation of the nano channels.This laser-based nano channel fabrication technique is fast and inexpensive,and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.A novel laser processing technique was developed for making channels in the nano regime in this paper.A Nd:YAG laser was used to dry fabricate micro channels(25μm～100μm di- ameter)in a 1 cm^3 fused silica substrate by thermal-induced processing.By controlling the locations of these initiating micro channels on a silica cube,1D-controllable self-connecting nano fractures can be formed as rectangular channels.These nano channels are smooth and with extremely high aspect ratio(～10~4 depth to width ratio).A possible mechanism is proposed to explain the formation of the nano channels.This laser-based nano channel fabrication technique is fast and inexpensive,and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

关 键 词：laser micromachining nano channel laser-induced splitting fracture mechanics 

分 类 号：TN249[电子电信—物理电子学]