球形和圆柱形系统内分子流场分布的对比研究  

A COMPARISON STUDY ON THE DISTRIBUTIONS OF THE MOLECULAR FLOW FIELD IN SPHERICAL AND PILLAR SYSTEMS

作　　者：李旺奎 董长昆[1] 

机构地区：[1]兰州物理研究所

出　　处：《真空科学与技术学报》1991年第1期37-44,共8页Chinese Journal of Vacuum Science and Technology

摘　　要：本文利用蒙特卡罗方法模拟了球形和柱形系统中分子流场的分布,给出了分布曲线。认为用柱形系统代替球形系统进行校准或测量时,若要求系统误差较小,有效测量区为柱形系统赤道附近、高约为柱高1/5的区域。通过对动态流量法测量系统的分析,得出采用测流量法比前级测压强法带来的系统误差要小的结论。对将公式P=Q/C_2和P=C_1P_1/(C_1+C_2)分别用于球形和柱形测量系统时,给出了修正系数。研究结果为多种真空系统的设计和应用提供了可靠的依据。The distributions of the molecular flow field in spherical and pillar systems are simula-ted by Monte Carlo method in this paper. It is shown that as the spherical container isreplaced by a pillar container in calibration or measurement, the effective measurementarea for smaller systematic error is around the equator of the pillar container within 1/5of the pillar height. By comparing and analyzing the measurement systems of the dynamicflow method it is firmly believed that the systematic error using foreflow measurementmethod is smaller than the one using forepressure measurement method. The revision coeffi-cients P=Q/C_2, P=C_1P_1/(C_1+C_2)for spherical and pillar measurement systems are obtainedseparately. The results in this paper provide reliable basis for the design and applicationof various vacuum systems.

关 键 词：测量系统 流场分布 动态流量 测量区 余弦定律 蒙特卡罗方法 测试带 圆柱形 分子流 流导 

分 类 号：TB7-55[一般工业技术—真空技术]