液态金属镓离子源实验研究  

EXPERIMENTAL STUDY OF THE LIQUID METAL Ga ION SOURCE

作　　者：王大文 陆家和 

机构地区：[1]清华大学电子工程系

出　　处：《真空科学与技术学报》1991年第4期233-237,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：本文叙述了液态金属镓离子源的制做方法和特性研究。提出了一种可用于同轴发射组件中长钨丝针尖的新的挂镓工艺,该工艺在挂镓的同时还可检验挂镓效果的好坏。所研制源已成功地用于扫描离子显微镜,并获得亚微米分辨率;其工作寿命长达300多小时,尚可更生,继续使用。In this paper, we have described the manufacturing method of liquid metal Ga ion source(LMIS) and its properties.A new Ga-wetting method suitable to long W wire is proposed. The wetting effect can be checked simultaneously to en-sure good wetting. The LMIS wetted by this method have been assembled in our scanning ion microscope (SIM). The re-solution of this SIM reached submicron. The life of our LMIS is longer than 300 hours. By adding a few drops of liquidGa into the LMIS,the source is renewed and can work again.

关 键 词：离子源 液态金属 离子显微镜 高温处理 聚焦离子束 工作寿命 针尖状 发射特性 引出电压 消隐 

分 类 号：TB7-55[一般工业技术—真空技术]