电容规的计量学特性研究  

STUDY ON THE METROLOGICAL CHARACTERISTICS OF THE CAPACITANCE DIAPHRAGM GAUGE

作　　者：李旺奎 董长昆[1] 

机构地区：[1]兰州物理研究所

出　　处：《真空科学与技术学报》1991年第5期308-314,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：本文从多方面研究了电容规的计量学特性。研究表明高压测量用规的零点稳定性主要受外界温度的影响,而低压测量电容规的零点在外界温度缓变时主要受膜片稳定性、线路稳定性等内在因素的影响。分析了温度突变对零点及测量的影响,指出了低压测量规零点的单调漂移性,指出了膜片受力发生形变对测量的严重影响。推导出了计算不确定度的公式。提出了一些有关电容规精密计量应用和一般使用方面的重要建议。研究结果对于电容规用作传递标准规、副标准规及精确测量规来说都具有重要的实用价值。The metrological characteristics of the capacitance diaphragm gauge (CDG) are studied from various aspects. Fromthe experiments we find out that the zero stability for a higher pressure measurement gauge is affected mainly by temper-ature and for a lower pressure measurement gauge by the diaphragm stability and circuit stability. The influence of tem-perature change suddenly on the zero stability and on the measurement are analyzed. The steady monotonic drift for lowerpressure measurement gauge was observed. Serious influence of shape's change of the diaphragm by force largely onmeasurement is pointed out. A fromula to evaluate the uncertainty is deduced and the relation between uncertainty andpressure is produced in this paper. Some important suggestions dealing with precise measurement and common uses arerecommended. The results have important practical values for using CDG as a transfer standard,a second standard,and aaccurate measurement gauge.

关 键 词：容规 外界温度 测量下限 不确定度 规头 电容变化 热偶 偏移量 零点输出 缓变 

分 类 号：TB7-55[一般工业技术—真空技术]