初应力对压电薄膜体声波谐振器厚度拉伸模态谐振特性的影响  

Effects of initial stresses on resonance characteristics of film bulk acoustic resonator in thickness-extension mode

作　　者：黄德进[1] 王骥[1] 罗昕逸 

机构地区：[1]宁波大学机械工程和力学学院,宁波315211

出　　处：《振动与冲击》2013年第10期146-148,156,共4页Journal of Vibration and Shock

基　　金：国家自然科学基金重点项目(10932004);浙江省重点科技创新团队(2011R09025-02);浙江省自然科学基金(LY12F01015);浙江省教育厅重点科研项目(Z201018143);宁波市自然科学基金(2011A610183);浙江省重中之重学科开发基金(ZJ1007)

摘　　要：研究了初应力对压电薄膜体声波谐振器(FBAR)厚度拉伸模态谐振特性的影响。利用含初应力压电材料的压电弹性基本方程,推导出理想FBAR在正弦激励电压作用下的振动方程。然后根据边界条件,求出问题的解。得到串联和并联谐振频率,并给出具体的数值算例,讨论了初应力对谐振频率、带宽和有效机电耦合系数的影响。所得结果对于提高和改善FBAR的性能有参考意义。Based on the fundmental piezoelastic equations of piezoelectric material with initial stresses,the vibration equation of ideal film bulk acoustic resonator(FBAR) under sinusoid excitation voltage was derived.The solutions were then obtained by considering the boundary conditions.The series and parallel resonance frequency were listed,and the effects of initial stresses on resonance frequency,bandwidth,and effective electromechanical coupling coefficient were discussed.A numerical example was presented to show the effects.The results give reference to the improvement of designing FBAR.

关 键 词：薄膜体声波谐振器 初应力 谐振频率 带宽 有效机电耦合系数 

分 类 号：TN015[电子电信—物理电子学] TN713TN752