基于AFM调制电信号的矢量式纳米加工系统的开发及其应用  

Developmentand and Application of Vector-mode Nanofabrication System by Modulating Electric Signals Based on AFM

作　　者：胡克想[1] 王庆康[1] 胡晓东[2] 吴森[2] 

机构地区：[1]上海交通大学薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200240 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《航空精密制造技术》2013年第1期1-6,共6页Aviation Precision Manufacturing Technology

基　　金：中国科技部国际合作项目(2012DFA11070);上海市科委国际合作项目(09520703100)

摘　　要：在Digital Instrument(DI)公司多功能SPM仪器的基础上,开发出基于原子力显微镜(AFM)调制电信号的矢量式纳米加工系统,成功地实现了纳米量级结构的加工及对加工电路中微弱电流的精密实时探测,实现了对加工电压的实时精确测量及对电容效应的实时观测等。Based on the multimode SPM of Digital Instrument company,the vector-mode nanomanufacturing system by modulating electric signals with atomic force microscopy(AFM) was developed.Many nanometer-scale structures have been fabricated by using this nanometric machining system.The real-time electric current and the actual fabricating voltage between the tip and the sample were monitored.The capacity effect was detected in the conductor-nonconductor-semiconductor junction formed in the course of fabrication.

关 键 词：纳米加工 原子力显微镜 调制电信号 矢量式 实时测量 纳米光栅 

分 类 号：TH16[机械工程—机械制造及自动化]