波面激光干涉仪在超精密加工中的应用  

Application of Wave Laser Interferometer in Ultra-precision Machining

作　　者：刘勇[1] 徐昌语 王帼媛 刘祎[1] 张建明[1] 

机构地区：[1]北京航空精密机械研究所,北京100076

出　　处：《航空精密制造技术》2013年第4期14-17,共4页Aviation Precision Manufacturing Technology

摘　　要：介绍了超精密加工的发展趋势和技术特点,介绍了波面激光干涉仪的测量原理及使用技巧,重点阐述了如何在超精密加工的多个环节,如工件检测、精密对刀、误差补偿中发挥波面激光干涉仪的作用。The development tends and technical features of the ultra-precision machining were discussed. The working principles of the wave laser interferometer were introduced. Its typical applications in the ultra-precision machining, such as workpiece measurement, precision tool setting and error compensation were presented.

关 键 词：波面激光干涉仪 超精密加工 测量 

分 类 号：TH744.3[机械工程—光学工程]