激光驱动冲击波实验用铝台阶加工与测量技术  

Fabrication and measurement of aluminium step used in laser driving shockwave experiment

作　　者：童维超[1] 袁光辉[1] 谢军[1] 李国[1] 黄燕华[1] 杜凯[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《制造技术与机床》2013年第11期20-22,共3页Manufacturing Technology & Machine Tool

基　　金：国家自然基金项目(51006093)

摘　　要：铝台阶是激光驱动冲击波实验中的重要实验用靶零件。采用金刚石车削方式加工铝台阶,利用白光共焦光谱测量原理测量样品厚度,通过Vecco NT1100白光干涉仪测量样品表面粗糙度。测量结果表明:铝台阶厚度误差小于1μm;厚度最大值与最小值相差小于0.1μm,厚度均匀性优于99.5%,样品厚度测量不确定度57 nm,铝台阶表面粗糙度值小于10 nm。Aluminum step is the important target part used in laser driving shockwave experiment. In this paper,the aluminum step was produced by diamond turning technology. The surface roughness is characterized by means of Vecco NT1100 device and the thickness is measured by chromatic confocal spectral device.The results indicate that the error of thickness of aluminum step is less than 1 μm,the maximum thickness and the minimum thickness is less than 0. 1 μm,thickness uniformity more than 99. 5% and the measurement uncertainty is about 57 nm. the surface roughness of aluminum step is less than 10 nm.

关 键 词：金刚石车削 冲击波 铝台阶 白光共焦光谱 

分 类 号：TG506[金属学及工艺—金属切削加工及机床]