功能薄膜火焰法沉积中硼化合物助剂的影响  

Effect of Boron Compound Addition in Flame Deposition of Functional Films

作　　者：贾毅[1,2] 刘刚[1,2] 武晓峰[1] 岳仁亮[1] 陈运法[1] 

机构地区：[1]中国科学院过程工程研究所,北京100190 [2]多相复杂系统国家重点实验室,北京100049 [3]中国科学院大学

出　　处：《稀有金属材料与工程》2013年第S1期64-67,共4页Rare Metal Materials and Engineering

基　　金：中国科学院重大科研装备项目(YZ200722);国家自然科学基金(NSFC)(51002154)

摘　　要：研究了不同添加量的硼助剂对火焰法沉积SiO2薄膜的形貌、结构及性能的影响。通过在含有硅和硼前驱物的同流扩散火焰上方沉积,获得了纳米结构的SiO2薄膜。SEM图像表明硼助剂导致了膜层颗粒物尺寸先增大后减小,薄膜沉积速率随着硼含量的增加逐渐增加。AFM的纳米力学定量测量(QNM,Bruker)结果表明:多种硼助剂添加量下,沉积膜的力学性能均得到了明显的提升。沉积膜经疏水化处理后,其超疏水性能变化体现了表面形貌、结构的差异。本文初步探索了硼助剂对沉积膜形貌、结构及性能影响的机理。Superhydrophobic SiO2 films have been prepared by a flame deposition method. The influence of boron compound as additive on the morphology, structure and property has been studied with SEM and quantitative nanomechanical property mapping (QNM, Bruker). SEM photographs show that the size of nanoparticles in the deposited film has increased due to the addition of boron compound. The deposit rate also improves as the concentration of the boron compound increases. Boron compound has effectively promoted the precursor reaction in the gas phase. As is shown by QNM characterization, under all selected concentrations of boron additive, boron compound improves the fusion between the flame made nanoparticles and the substrate, achieving higher binding capacity. The superhydrophobic property of deposited films has been affected by the changed morphology and structure caused by boron additive. The proportion of nano-scale structure on the surface has decreased, leading to a constant contact angle but greatly decreased rolling angle. The mechanism has been preliminarily explored based on the special property of boron and flame reaction process. Surface growth and low temperature diffusion contribute to the enhancement of film binding force.

关 键 词：火焰法沉积 硼化合物助剂 超疏水 纳米力学 

分 类 号：TB383.2[一般工业技术—材料科学与工程]