脉冲偏压电弧离子镀Zr-Me-N(Me=Cr,Al,Cu)薄膜性能研究(英文)  

Characteristics of Zr-Me-N(Me=Cr,Al,Cu)Films Deposited by Pulsed Bias Arc ion Plating

作　　者：张林[1,2] 林国强[1] 马国佳[1,2] 魏科科[1] 段仲伟 

机构地区：[1]大连理工大学三束材料改性教育部重点实验室,辽宁大连116024 [2]北京航空制造工程研究所高能束流加工技术重点实验室,北京100024

出　　处：《稀有金属材料与工程》2013年第S2期83-86,共4页Rare Metal Materials and Engineering

基　　金：National Nature Science Foundation of China(50824001)

摘　　要：利用脉冲偏压电弧离子镀在高速钢和Si基体上沉积锆基三元氮化物薄膜Zr-Me-N(Me=Al,Cr,Cu)。采用EPMA、XRD、SEM、接触角、纳米压痕、划痕仪以及摩擦磨损试验机分别研究薄膜的组分、结构、润湿性、力学性能和摩擦学性能。研究表明:Zr-Cr-N和Zr-Cu-N薄膜为单一相fcc B1(NaCl)结构;薄膜具有良好的结合力和较高的水接触角;ZrN中掺入过量的Al导致薄膜的力学性能降低。Zr-Cu-N薄膜显微硬度最高,达到35.5 GPa,而且纳米复合Zr-Cu-N薄膜能有效地降低摩擦系数。Zirconium based ternary transition metal nitrides films Zr-Me-N(Me=Al,Cr,Cu) were deposited on high-speed steel and silicon substrates by pulsed bias arc ion plating.The composition,structure,and surface morphology of the films were characterized by means of energy dispersive spectroscopy(EDS),X-ray diffraction(XRD),scanning electron spectroscopy(SEM),respectively.The water contact angle measurement was employed for the wettability of the films.The mechanical and tribological properties were investigated by nano-indentation,scratch tester and wear tests,respectively.The results show that the fcc B1(NaCl) typed phase is the only observed phase in Zr-Cr-N and Zr-Cu-N films.Zr-Me-N films have excellent cohesive strength and holds a rather large water contact angle.The Zr-Al-N film by doping excessive Al exhibits low mechanical properties.A maximum microhardness of 35.5 GPa is obtained for the Zr-Cu-N film.Furthermore,nanocomposite Zr-Cu-N film has a beneficial effect on wear resistance with the lowest friction.

关 键 词：电弧离子镀 三元氮化物 力学性能 摩擦系数 

分 类 号：TG174.4[金属学及工艺—金属表面处理]