面向智能高速机床的高频响加速度计研究  

Design of High Response Frequency Accelerometer for Intelligent High Speed Machine Tools

作　　者：孙禄[1] 赵玉龙[1] 刘岩[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710054

出　　处：《振动．测试与诊断》2013年第S1期157-159,228,共4页Journal of Vibration,Measurement & Diagnosis

基　　金：国家重点基础研究发展计划("九七三"计划)资助项目(2009CB724405);长江学者和创新团队发展计划资助项目(IRT1033);国家自然科学基金资助项目(51275402)

摘　　要：针对智能高速机床对高频响、微振动检测的需要,提出并研制了一种基于双桥梁结构的高频响微加速度传感器。利用Ansys静态与模态仿真,分析了双桥梁结构的应力状态和固有频率,一阶固有频率为11.8 kHz,达到了预定的设计要求。结合MEMS湿法刻蚀工艺与硅玻璃键和技术得到传感器样品。静态实验结果表明,双桥梁结构加速度传感器在3V的稳压电源下主轴灵敏度达到了0.264 mV/g,非线性度为0.67%,迟滞为2.69%。动态标定系统测试表明,传感器动态响应频率达到12.46 kHz,满足智能机床主轴在转速达到60 kr/min时的高频响测量要求。Ahigh response frequency accelerometer based on double-bridge beam structure was developed and fabricated to meet the needs of high response frequency vibration detection of intelligent high speed machine tools. Using static and modal analysis through Ansys, the stress and natural frequency of doublebridge beam were analysed, and the first order natural frequency was 11.8kHz, meeting the design requirement. An accelerometer sample was obtained by using wetting etching process and anodic bonding.The experimental results show the prime sensitivity of the developed accelerometer is up to 0.264mV /g with 3V DC power supply, with a nonlinearity of 0.67% and a hysteresis of 2.69%. Dynamic calibration experiment shows that the response frequency of the accelerometeris 12.46 kHz, meeting the need of high frequency measurement when the machine tool spindle rotates at the speed of 60kr/min.

关 键 词：智能高速机床 双桥梁结构 加速度传感器 振动监测 

分 类 号：TH824.4[机械工程—仪器科学与技术]