微型平面复合薄膜电爆炸开关的设计和研究(英文)  

Design and characterization of micro plane explosion switch with Al/CuO reactive multilayer films

作　　者：胡博[1] 朱朋[1] 沈瑞琪[1] 叶迎华[1] 吴立志[1] 胡艳[1] 

机构地区：[1]南京理工大学化工学院,南京210094

出　　处：《强激光与粒子束》2015年第2期46-51,共6页High Power Laser and Particle Beams

基　　金：supported by National Natural Science Foundation of China(51201091)

摘　　要：开关技术是影响爆炸箔起爆系统可靠作用、微型化、低能化、集成化的关键技术。电爆炸平面开关是利用强脉冲电流使触发极金属桥箔发生电爆炸,产生高温高压等离子体,使爆炸桥区两侧的电极导通。基于微加工技术,采用Al/CuO复合薄膜材料作为触发电极,设计制造了微型平面复合薄膜电爆炸开关。采用扫描电子显微镜、差示扫描量热法和光谱谱线测温研究了触发极Al/CuO复合薄膜的形貌、反应性和电爆炸等离子体温度,通过放电电流测试研究了开关性能。结果表明,在主回路电压2000V时,开关输出电流峰值约为1938A,上升时间390ns,性能优于仅以铜薄膜为触发电极的电爆炸平面开关。The micro plane explosion switch applied in the exploding foil initiator system consists of two main electrodes and one trigger electrode.An investigation on the influence of Al/CuO reactive multilayer films(RMFs)additives on the trigger electrode was performed.The trigger electrode has been characterized with scanning electron microscopy,differential scanning calorimetry and the atomic emission spectroscopy double line technique.The heat released in the thermite reaction between Al film and CuO film was found to be 1537J/g.The reaction temperature curves reached to the peak in about 0.5μs,and then dropped to a relatively stable temperature.Firing characteristics of the switch were accomplished using the designed experiment set up.The result shows that the peak and rise time of the discharge current were 1938 Aand 390ns for Cu/Al/CuO RMFs when main voltage was 2000 V,which was better than the trigger electrode only consisted of Cu film.

关 键 词：爆炸箔起爆器 反应复合薄膜 微机电集成制造 平面爆炸开关 

分 类 号：TM564[电气工程—电器]