基于微机电系统技术的高性能集成型微富集器(英文)  

High performance integrated micro-fabricated pre-concentrator based on MEMS

作　　者：孙建海[1] 宁占武[2] 马天军 朱小锋[2] 崔大付[1] 张璐璐[1] 李辉[1] 陈兴[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190 [2]北京市劳动保护科学研究所,北京100054

出　　处：《强激光与粒子束》2015年第2期131-135,共5页High Power Laser and Particle Beams

基　　金：supported by National Natural Science Foundation of China(61176112,60976088);Beijing Science and Technology Plan Project(Z141100003414003)

摘　　要：由于大部分环境样品的浓度非常低,为了实现其直接检测,提出将一种集成化的微型富集器应用到色谱系统中。富集器可实现色谱系统的进样与样品富集,能将色谱仪的检测限提高1~2个数量级。设计的富集器采用了高容量4平行通道结构,沟道内填充了高吸附率的Tenax-TA吸附材料,来实现对环境样品中挥发性有机化合物组分的富集。此外,为了密闭热解吸过程中所释放的组分,在微型富集器后集成了微型阀。试验结果表明,研制的微型富集器取得了15倍以上的富集因子。而且,通过微阀的控制,色谱峰的拖尾和峰展宽得到了有效的控制。因此,该微型富集器可广泛应用到环境样品的快速检测中,提高各检测器对复杂环境的适应能力。The concentration of most environmental samples is very low.In order to directly detect these samples,an integrated micro pre-concentrator,which can significantly improve detection limit of mini gas chromatography system with 1-2orders,is developed.The micro pre-concentrator has 4parallel channels filled with enough Tenax-TA as adsorbent materials for concentrating volatile organic compounds.For closing the released components during thermal desorption process,a micro-valve is integrated behind the pre-concentrator.The result demonstrates the proposed pre-concentrator can effectively concentrate components with a concentration factor of 15.Moreover,the chromatography peak broadening is greatly compressed under controlling by the microvalve.Therefore,the micro-fabricated pre-concentrator can be easy to deploy and suitable for a number of applications involving on-site monitoring of environmental samples.

关 键 词：微型富集器 富集因子 微型色谱系统 检出限 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置] TH-39[自动化与计算机技术—控制科学与工程]