阴极离子镀TiN涂层组织结构与结合强度  

Structure and bonding strength of Ti N coatings by cathode ion plating

作　　者：郭皓元 孔德军[1,2] 王文昌[3] 

机构地区：[1]常州大学机械工程学院,江苏常州213016 [2]常州大学江苏省材料表面科学与技术重点实验室,江苏常州213164 [3]常州大学石油化工学院,江苏常州213164

出　　处：《材料热处理学报》2015年第1期164-168,共5页Transactions of Materials and Heat Treatment

基　　金：江苏省科技支撑计划(工业)(BE2012066);中国学位与研究生教育学会研究课题(C1-2013Y07-051)

摘　　要：采用阴极离子镀方法在YT14硬质合金刀具表面制备了Ti N涂层,通过SEM、EDS和XPS等手段对涂层表面-界面形貌、界面化学元素线扫描和元素价态进行了分析,并用划痕法定量表征其界面层结合强度。结果表明,涂层呈细小致密结构,与基体紧密结合,未观察到裂纹现象;基体表面C原子以间隙扩散和空位扩散方式进入Ti N涂层中,O原子占领或替代Ti N涂层中N原子,形成结合较强的Ti-O键以及Ti-O-N化合物,验证了Ti原子和O原子具有很强的亲和力;涂层-基体界面为化合和扩散结合形式,其结合强度为40.95 N,有利于提高硬质合金刀具的使用寿命。Ti N coatings were prepared on the surface of YT14 hard alloy cutter by cathodic arc ion plating. The surface-interface morphology,element distribution of the interface and valence state of the elements were observed with SEM( scanning electron microscopy),EDS( energy dispersive spectrometer) analysis and XPS( X-ray photoelectron spectroscopy),respectively,bonding strength of the coatings was characterized with scratching tester. The results show that the coatings exhibit fine dense structure bonded with the substrate closely,and no cracks are observed. C atoms of the substrate surface go into Ti N coatings by vacancy and interstitial diffusion,and O atoms easily occupy the sites of atoms or substitute N atoms in Ti N coatings to form strong bonding of Ti-O bond and TiO-N compound,which proves that Ti and O atoms have strong affinity. The bonding forms of coating-substrate interface are compound and diffusion,and the interface bonding strength of 40. 95 N is of benefit to increasing service life of the hard alloy cutter.

关 键 词：阴极离子镀 硬质合金刀具 TI N涂层 XPS分析 结合强度 

分 类 号：TG174.44[金属学及工艺—金属表面处理]