金刚石覆镍量对固着磨料研磨蓝宝石性能的影响  

Effect of Diamond Coating Rate on Sapphire Lapping Performance by Fixed Abrasive Pad

作　　者：徐胜 朱永伟[1] 王加顺[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016

出　　处：《硅酸盐学报》2015年第4期445-450,共6页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金项目(51175260和51375237);中央高校基本科研业务专项资金项目(NP2012506);江苏高校优势学科建设工程项目

摘　　要：金刚石磨粒表面镀镍可以增强其与树脂的结合力。通过化学镀的方法在金刚石磨粒表面镀覆一层不同包覆率的Ni-P合金层,并制成了固结磨料研磨垫。采用CP-4型CMP抛光和测试系统,分别对蓝宝石进行粗研和精研加工,探索不同覆镍量对固着磨料研磨蓝宝石性能的影响。结果表明:金刚石磨粒表面镀镍可以改变其微观形貌:在实验范围内,随着金刚石包覆率的增加,摩擦因数、材料去除率和表面粗糙度呈现先增大后减小的趋势,其中粗研在包覆率为50%、精研在包覆率30%达到峰值;声发射信号呈现先减小后增大的趋势,其中粗研在包覆率50%、精研在包覆率30%达到谷值;粗研过程对包覆率的要求高于精研过程。Nickel plated on diamond grits surface can enhance its adhesive ability with resin.Diamond particles with different sizes were plated with a hydrophilic resin at different Ni-P coating rates by electroless plating.The morphology of coated particles was determined by scanning electron microscopy.The lapping tests on sapphire wafer as a work-piece were carried out in CP-4 CMP polishing and testing system.The effect of nickel coating rate on the lapping performance of sapphire in a fixed abrasive pad was investigated.The results show that the morphology of diamond particle changes after nickel electroless plating.The friction factor,material removal rate and surface roughness of lapped work-piece firstly increases and then decreases with the increase of coating rate,and the maximum values appear at a coating rate of 50%for rough lapping and at a coating rate of 30%for fine lapping.The acoustic emission intensity firstly decreases and then increases with the increase of coating rate,and the minimum value appears at a coating rate of 50%for rough lapping and at a coating rate of 30%for fine lapping.The demand of diamond coating rate for rough lapping is higher than that for fine lapping.

关 键 词：蓝宝石 镀镍金刚石 固结磨料研磨垫 研磨性能 

分 类 号：TQ164[化学工程—高温制品工业] TG73[金属学及工艺—刀具与模具]