甲基三乙氧基硅烷对多孔二氧化硅反射膜结构和性能的影响(英文)  

Effect of Methyl Triethoxysilane on Properties and Structure of Porous Siliate Antirefrective Coatings

作　　者：黄玉萍[1] 吴春春[1] 杨辉[1,2] 阙永生[1] 潘崇根[1] 

机构地区：[1]浙江大学浙江加州国际纳米技术研究院,杭州310058 [2]浙江大学材料系,杭州310027

出　　处：《硅酸盐学报》2015年第5期705-708,共4页Journal of The Chinese Ceramic Society

基　　金：浙江省教育厅项目(Y201122694);浙江省博后基金(Bsh1201017);中央高校基本科研业务专项基金(2014QN81006)

摘　　要：以TEOS(硅酸乙酯)为前驱体,MTES(甲基三乙氧基硅烷)为有机改性剂,Triton?X-100为模板剂,用酸催化溶胶-凝胶法制备了多孔二氧化硅增透膜。探讨了不同量的MTES对薄膜结构和性能的影响。结果表明:随着MTES用量的增加,减反射膜的疏水性增大,接触角由11°增加到93°,当MTES含量较低时(MTES与TEOS摩尔比0:1),减反膜中孔结构的孔径大部分在20~30 nm,当MTES与TEOS摩尔比为1:2时,20~30 nm孔径的孔结构比例增加,并出现孔径为30~40 nm的孔结构分布峰,当MTES含量进一步增加(MTES与TEOS摩尔比2:1时),20~30 nm孔径的孔结构进一步增加,30~40 nm孔径的孔结构含量下降。减反膜抗凝聚性能先增强后减弱,MTES与TEOS的摩尔比从0增加到1:2时,透过率变化量由2.1%减小0.12%,当MTES进一步增加(MTES/TEOS比=2:1)时,减反膜透过率变化量又增加到0.34%。与涂层表面的疏水性相比,MTES的含量引起的涂层内部的孔结构大小变化对减反射涂层的抗冷凝性能影响更大,当MTES与TEOS的摩尔比为1:2时,涂层达到最佳性能:透过率为5.58%,耐磨性能为0.25%,抗冷凝性能为0.12%。A porous silica anti-reflective(AR) coating was fabricated by a acid catalyzed sol-gel process with tetraethoxysilane(TEOS) as a precursor, methyl triethoxysilane(MTES) as an organic modifier and Triton?X-100 as a sacrificial template. The effect of MTES on the properties and structure of porous Si O2 antireflective coating was investigated. The results indicate that the hydrophobicity of the coating increases with the increase of MTES, and the contact angle of the coating increases from 11° to 94° when a mole ratio of MTES to TEOS changes from 0:1 to 2:1. The pore size in coating is between 20 to 30 nm at a small amount of MTES in the coating(i.e., a mole ratio of MTES to TEOS is 0:1). The proportion of the pores with the size of 20–30nm increases and some pores with the size of 30–40 nm appear when a mole ratio of MTES to TEOS is 1:2. At a mole ratio of MTES to TEOS of 2:1, the proportion of pores with the size of 20–30 nm increases and the number of pores with the size of 30–40 nm decreases. The condensation resistance of coating firstly increases and then decreases slightly with increasing the MTES. The results indicate that the pore size in coating induced due to the addition of MTES has an effect on the coating performance like the condensation resistance rather than the hydrophobicity. At a mole ratio of MTES to TEOS of 1:2, the coating has the superior performance(i.e., the transmittance of coating is 5.58%, the abrasion resistance is 0.25%, and the condensation resistance is 0.12%).

关 键 词：硅酸乙酯 甲基三乙氧基硅烷 二氧化硅 多孔减反射膜 抗凝聚性能 

分 类 号：O613.72[理学—无机化学] TB383.2[理学—化学]