光学表面非均匀中频误差的评价与修正  

Evaluation and modification of nonuniform mid-spatial frequency error in optic surface

作　　者：张昊宇[1] 钟波[1] 赵世杰[1] 李瑞洁[1] 李海波[1] 陈贤华[1] 

机构地区：[1]成都精密光学工程研究中心,四川成都610041

出　　处：《应用光学》2015年第2期294-299,共6页Journal of Applied Optics

基　　金：国家科技重大专项课题(2013ZX04006011-101)

摘　　要：针对光学元件使用过程中中频误差将导致光学元件的激光破坏这一问题,提出一种中频误差突出频率提取方法。采用基于统计学的多样本数据处理,对于每一种采样方向都可以得到数个较为突出的不合格频率。利用这些频率进行确定性加工后,在特定方向,空间频率0.044 1mm-1,0.085 8mm-1,0.041 7mm-1所出现的不合格次数分别降至加工前的23.9%,18.3%,29.2%,而整体中频误差减少至50.1%。结果表明,此方法降低了由光学表面中频误差方向性与局部性引起的不确定性。Mid‐spatial frequency(MSF) wavefront error leads to laser damage during the use of optics . T herefore the accurate evaluation and modification are necessary in manufacture . A unique way based on multi‐sample analysis was proposed for error frequency .Several outstanding fre‐quencies were found in every sampling direction .After eliminating with the help of these frequencies ,a‐long with certain sample direction ,unqualified frequency errors in 0 .041 7 mm-1 ,0 .085 8 mm -1 , 0 .041 7 mm -1 were down to 23 .9% ,18 .3% ,29 .2% ,respectively ,while the MSF in whole optic surface decreased to half . According to the method above , the uncertainty caused by directionality and regionality of MSF in optic surface can be restrained .

关 键 词：光学加工 中频误差 小波变换 频率提取 

分 类 号：TH74[机械工程—光学工程]