基于数字光刻投影系统的快速微加工技术  

Rapid microfabrication technology based on digital lithography projection system

作　　者：张雅雅[1] 崔建国[1] 

机构地区：[1]重庆理工大学药学与生物工程学院,重庆400054

出　　处：《应用光学》2015年第3期448-453,共6页Journal of Applied Optics

基　　金：重庆市自然科学基金项目(cstc2011jjA10018);重庆理工大学实验技术基金项目(Sk201403)

摘　　要：设计一种经济有效的微流体芯片加工方法,可以快速地在聚二甲基硅氧烷(PDMS)表面加工出不同尺寸的微流路。利用商用数字投影仪的成像原理,对其进行简单的改装,得到成缩小像的数字光刻投影系统(DLPS),并利用该系统在PDMS表面加工微流路;同时通过荷叶效应和毛细吸附效应两组实验,对DLPS的加工性能进行了验证和应用。该DLPS可在PDMS表面加工微结构,最小稳定加工精度可达40μm,通过模仿荷叶效应获得的材料表面,其疏水角增加到123°±3°。该DLPS系统可用于快速加工微流体芯片,当流路尺寸要求不是很严格时,低成本和高效率等优点使该系统完全适合在普通实验室开展微流体技术的研究。To design a cost-effective microfluidic chip's processing method,which can quickly fabricate different size micro-channels on polydimethylsiloxane(PDMS)surface,we used the method depending on the imaging principle of commercial digital projector,carried on the simple configuration,and then got a reduced image named as digital lithography projection system(DLPS),which could be used to fabricate the micro-channel on the PDMS surface.Moreover,through lotus leaf effect and capillary adsorption effect experiments,the processing performance of DLPS was verified and applied.Results show that the DLPS can process microstructure on PDMS surface,the minimum stable machining precision can reach 40μm,through the simulation of lotus leaf effect,the material surface's hydrophobic angle is 123°±3°.The DLPS can be used for rapid processing of microfluidic chip,and when the channel size is not very strict,this low-cost and high-efficiency can make the system completely suitable for general laboratory.

关 键 词：薄膜光学 微流路 数字光刻投影系统 聚二甲基硅氧烷 荷叶效应 毛细吸附效应 

分 类 号：TN305.7[电子电信—物理电子学]