基于块匹配技术的ME MS器件平面微运动特性的测量  

Measurement technique of In-plane motionfor MEMS based on block matching

作　　者：金翠云[1] 栗大超[1] 靳世久[1] 王立坤[1] 李一博[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《吉林大学学报（工学版）》2004年第3期445-448,共4页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家"863"高技术研究发展计划资助项目(2002AA404090).

摘　　要：为测量MEMS谐振器周期运动过程中各个时刻的运动特性及其动态特性参数,基于频闪成像原理得到了MEMS谐振器一个周期内各时刻的清晰运动图像,利用块匹配技术对MEMS谐振器的运动图像进行处理,从而得到其特性参数,为MEMS器件的设计提供重要参考。实验结果表明,该方法具有较好的测量精度,测量重复性达到40nm。In order to measure motion characteristic and dynamic parameters of MEMS resonator in every moment based on the technique of stroboscopic imaging, clear motion images in one cycle were obtained. Using block matching technique to process motion images of MEMS resonator, the dynamic parameters were also obtained, which give important reference to MEMS designation. Experimental results indicate that the repetition of measurement is 40 nm.

关 键 词：自动控制技术 MEMS谐振器 动态特性 频闪成像 块匹配 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]