YBa_2Cu_3O_(7-δ)超导薄膜保护层的研制  

FABRICATION OF PROTECTIVE LAYERS ON THE SURFACE OF YBa_2Cu_3O_(7-δ) SUPERCONDUCTING THIN FILMS

作　　者：孙志坚[1] 李海宏 杨森祖[1] 康琳[1] 张晖 吴培亨[1] 张世远[2] 张鸿才[2] 

机构地区：[1]南京大学信息物理系,南京210008 [2]南京大学物理系,南京210008

出　　处：《低温物理学报》1993年第3期177-182,共6页Low Temperature Physical Letters

基　　金：国家超导中心资助的项目

摘　　要：本文在YBa_2Cu_3O_(7-δ)超导薄膜表面原位沉积了一层30～50(?)厚的CaF_2保护层。实验证明:CaF_2层保护后的超导薄膜,经光刻和化学刻蚀后,临界温度T_c下降量不超过1.0K,且对水、CO_2、丙酮具有很好的防护作用。通过X射线光电子谱、X射线衍射谱,我们还研究了CaF_2保护层对YBa_2Cu_3O_(7-δ)超导薄膜表面及其结构的影响。CaF2 protective layers with the thickness of 30-50A have been-fabricated in-situ on the surface of YBa2Cu3O7-δ superconducting thin films. The experimental results indicate that super-condueting thin films protected by CaF2 thin films degrade very little after chemical ething; and have good resistance to water, CO2 and acetone. We also investigate the influence of CaF2 protection layers on both the surface and the structure of YBa2Cu3O7-δ superconducting thin films by means of X-ray photo electron spectrum and X-ray diffraction pattern in this paper.

关 键 词：超导膜 保护 氟化钙 YBCO 

分 类 号：O511.1[理学—低温物理]