能动反射镜低频像差补偿能力分析  

Analysis on compensating capabilities of the low frequency aberrations for active deformable mirror

作　　者：杨李成[1] 凌宁[1] 曾志革[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《强激光与粒子束》2004年第7期843-847,共5页High Power Laser and Particle Beams

基　　金：国家863计划项目资助课题

摘　　要：　采用Algor软件包并利用有限元法对37单元能动反射镜低频误差补偿能力进行了分析计算,确定了镜面厚度8mm,驱动器间距46mm,极头直径12mm等能动反射镜制造的关键参数。通过计算机仿真分析证明,基于这些参数所设计的能动反射镜可以对低频误差进行有效校正,校正精度的均方根值小于等于λ/8,从而可以为能动反射镜的制造提供理论依据。In this paper , compensating capabilities of the low frequency aberrations for 37 elements active deformable mirror have been analysed by the finite element method and Algor software. The key parameters are confirmed: mirror thickness 8mm, driver span 46mm and pole diameter 12mm. The simulation analysis shows that the low frequency aberrations of 37 elements active mirror can be corrected effectively. The RMS of the aberrations corrected is nogreater than λ/8. This gives the theoretic evidence for producing the active mirror.

关 键 词：能动反射镜 低频误差 有限元法 补偿 影响函数 

分 类 号：TH741[机械工程—光学工程]