燃料喷嘴口微孔的几何与表面表征(英文)  

Geometry and Surface Characterization of Micro-Holes in Fuel Injector Nozzles

作　　者：王伟立 胡仕新 

机构地区：[1]美国密西根大学机械工程系

出　　处：《纳米技术与精密工程》2004年第1期65-70,共6页Nanotechnology and Precision Engineering

摘　　要：燃料喷嘴口的微孔在汽车发动机的燃料效率和尾气排放中起关键作用 .微孔的几何与表面质量的表征对理解其制造过程及其对喷嘴功能的影响十分重要 ,然而由于其尺寸小 ,对这类微孔质量的表征一直是一个难题 .本文介绍作者最近进行的用扫描电子显微镜、扫描隧道显微镜、原子力显微镜来表征微孔质量研究的一个实例 .虽然大多数计量系统并不是为测量像喷嘴口的微孔这类非平面特征设计的 ,只要合理选择装置和测头 。Fuel injector nozzles with micro fabricated holes play a critical role in fuel efficiency and emission in automotive engines. Characterization of the geometrical and surface quality of micro holes is important to understanding the manufacturing process and its impact on the function of the injector. However, due to the small size, it has been difficult to characterize the quality of such micro holes. In this paper, we present a case study conducted recently for micro hole quality characterization using scan electron microscope (SEM), scan tunneling microscope (STM), and atom force microscope (AFM). Although most metrology systems are not designed for measuring non flat features, such as the micro holes in the nozzle, with appropriate choice of setup and probes, high precision multiple scale characterization of the micro holes can be achieved.

关 键 词：汽车发动机 燃料喷嘴口 微孔 几何表征 扫描隧道显微镜 原子力显微镜 

分 类 号：U464[机械工程—车辆工程]