Investigations and experiments of a new multi-layer complex liquid-cooled mirror  

作　　者：陆宇灵 程祖海 张耀宁 孙锋 余文峰 

机构地区：[1]State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074 [2]State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074his paper describes a new multi-layer complex liquid-cooled Si mirror with 3 cooling ducts in Archimedes spirals. Utilizing the ANSYS program, the structure of the mirror is optimized and the thermal deformation model of the mirror is simulated. The simulation results show that the mirror has the following advantages: very small amount of surface deformation, uniform distribution of temperature and surface deformation, and fast surface shape restoration. The results of the experiments of thermal deformation and the surface restoration are accurately mapped to the simulation results.

出　　处：《Chinese Optics Letters》2004年第7期407-410,共4页中国光学快报（英文版）

摘　　要：This paper describes a new multi-layer complex liquid-cooled Si mirror with 3 cooling ducts in Archimedes spirals. Utilizing the ANSYS program, the structure of the mirror is optimized and the thermal deformation model of the mirror is simulated. The simulation results show that the mirror has the following advantages: very small amount of surface deformation, uniform distribution of temperature and surface deformation, and fast surface shape restoration. The results of the experiments of thermal deformation and the surface restoration are accurately mapped to the simulation results.This paper describes a new multi-layer complex liquid-cooled Si mirror with 3 cooling ducts in Archimedes spirals. Utilizing the ANSYS program, the structure of the mirror is optimized and the thermal deformation model of the mirror is simulated. The simulation results show that the mirror has the following advantages: very small amount of surface deformation, uniform distribution of temperature and surface deformation, and fast surface shape restoration. The results of the experiments of thermal deformation and the surface restoration are accurately mapped to the simulation results.

关 键 词：Computer simulation DEFORMATION Mirrors MULTILAYERS Silicon Structural optimization Water cooling systems 

分 类 号：TN24[电子电信—物理电子学]