高灵敏的酞菁铜薄膜NO_2气体传感器  

The Highly Sensitive NO_2 Sensors Based on Copper Phthalocyanine Thin Films

作　　者：傅敏恭[1] 龙定华[1] 游幼 赵湛[2] 邹子亚[2] 杨连贵[2] 

机构地区：[1]江西大学化学系,南昌330047 [2]中科院电子学研究所,北京100080

出　　处：《电子学报》1993年第2期89-92,共4页Acta Electronica Sinica

基　　金：国家自然科学基金

摘　　要：本文采用真空气相物理沉积技术,在平面叉指电极上沉积酞菁铜薄膜制成的气体传感器。该传感器对NO_2有很高的灵敏度和良好的选择性,能检测出空气中1ppm浓度的NO_2,响应时间几十秒、恢复时间几分钟。在320℃下进行退火处理,传感器的稳定性和重复性有明显的改善。The gas sensors based on copper phthalocyanine thin films are reported in the paper. The copper phthalocyanine thin films are deposited on the plane interdigital electrode by using vacuum gas phase physical deposition technique. The results show that the sensors exhibit high sensitivity and high selectivity to NO2 gas, and can be used to detect 1 ppm of NO2 in air. Response time of less than 1 minute and recovery time of the order of several minutes are observed. Annealed at 320℃, the stablity and the repeatability of the sensors are improved.

关 键 词：传感器 酞菁铜 NO2传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]