微细电火花加工装置的设计与应用  

Design of a Micro EDM Equipment and Its Application

作　　者：张勇[1] 王振龙[1] 胡富强[1] 赵万生[1] 

机构地区：[1]哈尔滨工业大学机电学院,哈尔滨150001

出　　处：《微细加工技术》2004年第2期55-59,65,共6页Microfabrication Technology

摘　　要：设计开发了一台用于微细电火花加工的微细加工装置,它主要由以下几个部分组成:花岗岩基座、精密伺服机构、精密高速旋转主轴、线电极磨削装置、微细电火花加工用的RC脉冲电源、加工状态检测系统和控制系统。在该装置上可以进行微细轴、微细孔和微三维结构的加工。具有4轴3联动功能,控制方便,容易实现数控插补功能。加工实验表明,在该装置上能稳定地加工出最小直径为12μm的微细轴以及25μm的微细孔,其长径比可分别达到25和10以上。并对半导体硅材料进行了加工实验,加工出的硅微梁深宽比达15以上。此外还给出了所加工的微三维结构实例。A micro electro discharge machining (EDM) equipment is developed. It includes granite basement which can decrease distributed capacitance, precise servo mechanism, precise high speed rotary spindle, wire electro-discharge grinding device,a RC-pulse generator used by micro EDM, machining states detecting system and machining process control system.The CNC interpolation for the 3 axes linkage movement can be realized easily on this equipment. Therefore, micro shaft, micro hole, and 3D microstructure can be machined easily by this equipment. Machining experiments show that the micro shaft with the diameter as small as 12?μm and the micro hole with minimum size of 25?μm could be obtained steadily, and the maximum aspect ratios of micro shaft and micro hole are over 25 and 10 respectively. And silicon micro-EDM experiments show that the micro beam with the aspect ratio over 15 can be obtained easily. At last, a complicated 3D microstructure is machined by this equipment and micro-EDM technology.

关 键 词：微细电火花加工 装置 微细轴 微细梁 微三维结构 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]