MCP电子透射膜的制备及半视场特性  

Fabrication of Electron Transmission Film at the Input of MCP and Its Half View Properties

作　　者：闫金良 

机构地区：[1]烟台师范学院物理系,山东烟台264025

出　　处：《半导体光电》2004年第3期188-190,241,共4页Semiconductor Optoelectronics

基　　金：国家"863"计划资助项目(2001AA313090)

摘　　要：　介绍了微通道板(MCP)电子透射膜在成像器件中的功能,分析了冷基底溅射制膜技术和有机膜涂覆及焙烧的方法制备MCP电子透射膜的工艺缺陷,提出了一种新的MCP输入面电子透射膜的制作方法。在一块MCP输入面的半圆上制作了4nm厚电子透射膜,研究了相同条件下MCP带膜半圆和不带膜半圆的光学反射表面显微形貌、输出电流密度特性和半视场亮度特性。The function of electron transmission film at the input of microchannel plate(MCP) in imaging devices is briefly reported. The imperfection of process techniques consisting of the cold base sputtering, the organic film coating and burning out is analyzed to prepare electron transmission film at the input of MCP. A new method is suggested for preparing electron transmission film at the input of MCP. A 4 nm thick electron transmission film is fabricated on half-circle of the input of MCP, and a comparison of the reflection optical micrographs, output current density and half view brightness is carried out between MCP with half-circle film and MCP without half-circle film at the same experimental parameters.

关 键 词：微通道板 电子透射膜 薄膜制备 像管 

分 类 号：TN105.1[电子电信—物理电子学]