工业应用放电泵浦准分子激光器研究进展  

Status and Key Technology of Excimer Laser Research for Industrial Application

作　　者：高怀林[1] 杨艳霞[1] 

机构地区：[1]中国科学院电子学研究所,北京270245信100080

出　　处：《激光杂志》2004年第4期1-3,共3页Laser Journal

摘　　要：本文主要介绍工业应用对于放电泵浦的KrF、XeCl、ArF准分子激光器的一般要求 ,以及对于极端高重复频率、高平均功率准分子激光器要解决的关键技术问题与国际研究进展。并简要介绍电子束泵浦的重复频率高能。In this paper,review the status and key technology of excimer laser research for industrial application today,including the relations of laser's output energy and average power with the working rep-rate,the stabilities of the output energy and the power from shot to shot,and the key technologies,for examples,the X-ray pre-ionization,gas's circulation rate,novel materials of the laser cavity and the surface roughness of the cathode.Finally,simply introduce the rep-rate electron-beams-pumped excimer laser for inertial confinement fusion in America and Japan.

关 键 词：激光应用 准分子激光器 放电泵浦技术 电子束泵浦技术 

分 类 号：TN248.1[电子电信—物理电子学]