邻近导体布局对电光测量的影响  

Effect of the Vicinity Conductor Layout on Electro-Optic Measurement

作　　者：闫欣[1] 张洪波[1] 张大明[1] 侯阿临[1] 刘鸿飞[1] 衣茂斌[1] 

机构地区：[1]吉林大学集成光电子学国家重点实验室吉林大学实验区,吉林长春130023

出　　处：《微电子学》2004年第4期428-431,共4页Microelectronics

基　　金：国家自然科学基金资助项目(68976014)

摘　　要：　采用静态有限差分法[1],求解了电光探测时探头内部的电场分布;发现了电光信号随布线的变化,设计了一系列不同布线的电极;采用ITO导电膜进行电光信号幅度校准并减少串扰。理论分析与实验结果符合得很好。最后,分析了ITO导电膜对CMOS反相器高频特性的影响。Electric field distribution in the probe tip of an external eletro-optic measurement system is analyzed by using static finite difference method.Effect of the layout of the circuit under test on the voltage sensitivity is also investigated using parallel strip electrode structures with different spacing. The results show that the electro-optic signal can be calibrated with a reference electrode (ITO) on the backside of the probe tip. Finally, effect of the ITO on the high frequency characteristics of a CMOS inverter is also analyzed.

关 键 词：电光测量 邻近导体布局 信号幅度校准 参考电极 

分 类 号：TN407[电子电信—微电子学与固体电子学]