法布里-珀罗板正弦相位调制型高精度角位移测量  

High-Accuracy Angular Displacement Measurement Using Sinusoid al Phase-Modulating Fabry-Perot Interferometer

作　　者：张彩妮[1] 王向朝[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海800216

出　　处：《光学学报》2004年第8期1141-1145,共5页Acta Optica Sinica

基　　金：国家 8 6 3计划MEMS专项 (2 0 0 2AA4 0 4 0 5 0 )资助课题

摘　　要：提出了一种基于法布里珀罗板和正弦相位调制干涉术的角位移测量新方法。采用CCD探测法布里珀罗板两透射光束光斑的中心距 ,通过运算得到了入射光的初始角 ,解决了采用法布里珀罗板干涉法测量角位移需确定入射光初始角的问题。采用正弦相位调制干涉术通过测干涉信号的相位来测量物体的角位移 ,增强了对杂散光的抗干扰能力 ,减少测量误差 ,提高了测量精度。理论模拟和实验结果表明本方法可以实现精度为 10 -8rad数量级的高精度角位移测量。A sinusoidal phase-modulating Fabry-Perot in te rferometer is proposed. A CCD image sensor is used for measuring the distance be tween the transmitted beams from the two faces of the Fabry-Perot plate. From t he distance, the initial angle of incidence is calculated. The sinusoidal phase -modulating interferometry is used for improving the measurement accuracy. It i s insensitive to the external disturbance. Numerical calculation and experimenta l results make it clear that the interferometer allows high-accuracy measuremen ts of angular displacements. The sensitivity is of the order of 10 -8 rad.

关 键 词：物理光学 角位移测量 法布里-珀罗板 正弦相位调制干涉术 

分 类 号：TN247[电子电信—物理电子学]