β-BaB_2O_4薄膜制备技术的研究和进展  

STUDY ON PREPARATION TECHNIQUES AND DEVELOPMENTS FOR β-BaB_2O_4 FILMS

作　　者：刘军芳[1] 王海丽[1] 何晓明[1] 赵广军[1] 周国清[1] 徐军[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《硅酸盐学报》2004年第5期636-641,共6页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金(60308003)资助项目。

摘　　要：为了满足飞秒超快激光技术和集成光学发展的需要、解决βBaB2O4(βBBO)体单晶中因厚度带来的群速度失配问题以及脉宽展宽等问题,人们开始了βBBO薄膜的制备技术研究。文章简要总结了现有的βBBO薄膜的制备技术,包括溶胶凝胶法、脉冲激光沉积法、磁控溅射法和金属有机化学气相沉积法;讨论了各种制备技术的发展现状及其优缺点;提出了目前薄膜制备及应用中存在的一些问题及今后的发展方向。In order to meet the demand of the developing femtosecond laser techniques and integrated optics, to resolve the problems of group velocity mismatching, pulse spreading etc in the β-BaB2O4 (β-BBO) single crystals which caused by the thickness, the preparation techniques of β-BBO films have been studied. The current growth techniques for β-BBO films including sol-gel, pulsed laser deposition, opposed-targets magnetron sputtering and metallorganic chemical vapor deposition have been reviewed briefly. The recent progress, the advantages and disadvantages of the different techniques are discussed at the same time. Meanwhile, the problems still existed in the preparations and applications together with the developments directions for β-BBO films are indicated.

关 键 词：β-偏硼酸钡薄膜 群速度失配 脉宽展宽 制备工艺 相位匹配 

分 类 号：TQ171[化学工程—玻璃工业]