混合微电子技术在氧化锆基氧传感器上的应用  

Application of Mixture-microelectronic Technology on the Oxygen Sensors Based on Zirconia

作　　者：俞守耕[1] 

机构地区：[1]昆明贵金属研究所,云南昆明650221

出　　处：《贵金属》2004年第3期62-66,共5页Precious Metals

摘　　要：用厚膜、薄膜和叠片工艺制作的氧传感器,降低了总阻抗,从而降低了工作温度和缩短了响应时间。通过测量电离或催化反应得到的氧,极限电流型气体传感器的测量范延伸到H2O、CO2、H2、CO和HCs。采用离子-电子混合导体膜作为扩散控制层改善了电流测量型传感器的性能。与掺杂Y2O3稳定的ZrO2相比,采用掺杂In2O3、Y2O3稳定的ZrO2可抑制老化时电导率的降低。用高能球磨技术可以制备3价阳离子稳定的氧化锆。Oxygen sensors fabricated by thick-film, thin-film, and lamination technology decreased total impedance leading to the decreases of working temperature and reducing response time. Limiting-current-type gas sensors have been extended and used to detecte H2O, CO2, H2, CO, and HCs through measuring oxygen produced by electro-dissociation or catalytic reaction. Application of mixed ionic-electronic conductor membrane as diffusion-controlled layer improved sensing properties of amperometric sensor. In2O3, Y2O3-stabilized zirconia has can suppress the decrease of conductivity with aging as compared with Y2O3-stabilized zirconia. Trivalente cation-stabilized zirconia has been prepared using the high-energy ball milling technique.

关 键 词：氧化锆 氧传感器 电位测量型传感器 电流测量型传感器 电阻型传感器 气体传感器 混合微电子技术 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]