用于干涉测量的光栅外腔半导体激光器  

Grating External Cavity Semiconductor Laser Used in Interference Measurement

作　　者：赵伟瑞[1] 谢福增[2] 

机构地区：[1]北京理工大学光电工程系,北京100081 [2]中国科学院半导体研究所,北京100083

出　　处：《中国激光》2004年第8期911-914,共4页Chinese Journal of Lasers

摘　　要：研制了用于光干涉测量的单稳频、窄线宽光栅外腔半导体激光器 (LD)。它由出光面镀有增透膜的单管半导体激光器、光束校正准直系统、闪耀光栅、注入电流驱动系统及温度控制系统组成。闪耀光栅作为外腔光反馈元件对单管半导体激光器输出的纵模进行选择 ,使之工作在单纵模状态。外腔的引入还使输出光的谱线宽度得以大大压窄。注入电流驱动系统为半导体激光器提供工作电流。温度控制系统由双层温控组成。第一层用于控制单管半导体激光器管芯温度 ;另一层用于及时带走第一层温控产生的热量 ,并消除环境温度影响 ,使外腔温度稳定。该温控系统可使所构成激光器的温度稳定在 1‰℃量级。对研制的外腔半导体激光器的特性进行测试 ,其输出功率恒定、模式单一稳定、谱线宽度优于 1.4MHz。A single stable frequency and narrow line width external cavity semiconductor laser used in interference measurement is proposed. It is constructed with a semiconductor laser, collimation system, a blaze grating, and current and temperature control systems. The one facet of the semiconductor laser is covered by high transmission film, and the other is covered by high reflection film. The blaze grating is used as external cavity light feedback element to select the mode of the semiconductor laser. The current control system is used to provide drive current to the semiconductor laser, and the drive current is allowed to be adjusted in certain range. The temperature is controlled with double temperature controls to make the temperature of the external cavity stabilized in order of 10 -3 ℃. Thus a single longitudinal mode, narrow spectral line width and stable frequency external cavity semiconductor laser is realized, and its spectral line width is compressed to be less than 1.4 MHz and the output stability (including power and mode) is remarkably improved.

关 键 词：激光技术 外腔半导体激光器 外腔光反馈 闪耀光栅 单纵模 谱线宽 

分 类 号：TN248.4[电子电信—物理电子学]