自聚焦超晶格波导电光调制器(英文)  

Electro-optic modulators with self-assembled superlattice waveguides

作　　者：孙德贵[1] 刘志福[1] HO Seng-Tiong 康虎[2] 朱培旺[2] MARKS Tobin 

机构地区：[1]美国西北大学量子光学实验室,埃维斯顿伊利诺斯州60208 [2]美国西北大学化学系,埃维斯顿伊利诺斯州60208

出　　处：《光学精密工程》2004年第4期386-392,共7页Optics and Precision Engineering

基　　金：ThisworksupportedbyDARPA/ARO ;andtheMRSECProgramofNSFatNorthwesternUniversity .

摘　　要：研制了一种基于自聚焦超晶格薄膜电光波导调制器。首先给出了自聚焦超晶格薄膜电光特性的测量和器件结构的优化设计,采用测量二次谐波生成值对入射角的依赖关系测定了薄膜的有效电光系数,保证了器件的设计精确有效。利用多层膜传输理论研究了器件电极对光波的最大吸收,并对器件结构进行了优化,获得了最小调制电压。其次给出了所加工的实验模型结构和扫描电子显微镜(SEM)图片,确保了加工质量和设计结果的一致。研究结果表明:这种无需外电场极化处理的新型聚合物薄膜电光调制器加工难度小,并且光学损耗优化到了1.0dB/cm。This paper reports a new waveguide electro-optic (EO) modulator with self-assembled superlattice (SAS) electro-optic films. This work focuses on the measurement for the EO coefficient of SAS films and the optimization for the devices structure. In order to have a precise and effective design, we test the angle-dependence of the second harmonic generation of incident laser beam to determine the effective EO coefficient. We study he absorptive loss of electrodes of devices with the optical propagation theory of multi-layered films and optimize the devices structure to obtain the lowest drive voltage. The paper gives the structure of experimental samples and the scanned electronic microscopy (SEM) pictures of our fabricated devices. Finally, 1.0 dB/cm optical propagation loss of the EO modulators is achieved, which agrees with the experimental results.

关 键 词：电光调制器 自聚焦超晶格 波导 光传输损耗 传输矩阵 

分 类 号：TN252[电子电信—物理电子学]