Two-Dimensional Fluid Simulation of Collisional Plasma Sheath over rf Powered Electrode with Cylindrical Hole  

作　　者：侯璐景 王友年 Z.L.Miskvic 

机构地区：[1]State Key Lab of Materials Modification by Beams,Department of Physics,Dalian University of Technology,Dalian 116023,China [2]Department of Applied Mathematics,University of Waterloo,Waterloo,Ontario,Canada N2L 3G1he characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.

出　　处：《Plasma Science and Technology》2004年第4期2404-2410,共7页等离子体科学和技术（英文版）

基　　金：The project supported by the National Natural Science Foundation of China(No.19975008 and 10275009)and by MOEC (Ministry of Education,China)Grant for Cross-Century Excellent Scholar;Support from the Natural Sciences and Engineering Research Council of C

摘　　要：The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.

关 键 词：two-dimensional sheath numerical simulation dusty plasma 

分 类 号：O539[理学—等离子体物理]