大行程纳米级步距压电电动机  

PIEZOELECTRIC MOTOR WITH LONG-RANGE AND NANO-STEP

作　　者：赵美蓉[1] 温丽梅[1] 林玉池[1] 张玉祥 

机构地区：[1]天津大学精密测试技术及仪器国家重点试验室,天津300072

出　　处：《机械工程学报》2004年第8期119-122,共4页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(50105016)。

摘　　要：介绍了一种基于尺蠖运动原理的大行程纳米级步距压电电动机。在结构设计方面,变传统单驱动器结构为双驱动器结构,采用新颖的推-拉接力运动原理,配以适当的四路驱动信号,实现了压电电动机的连续匀速运动。通过试验对电动机的性能进行了测试,结果表明:电动机的运动位移是线性的,运动速度在驱动电压为300 V时可达12μm/s,最小步距小于6nm,行程大于10mm。A kind of piezoelectric motor with long-range and nano-step is introduced. The principle of inchworm motion is based on and improved in the PZT motor. In structure design, the traditional single actuator is updated to double actuators. With the novel principle of push-pull relay movement and proper four-channel driving signals, the PZT motor can move continuously and smoothly. The performances of the motor are tested through experiments. The experiment results show that the motion of the piezoelectric motor is linear, the moving speed can reach 12 μm/s at the voltage of 300 V and the minimal step is less than 6nm, the moving range is more than 10 mm.

关 键 词：压电电动机 尺蠖运动 纳米驱动 纳米定位 结构设计 纳米技术 

分 类 号：TM3[电气工程—电机] TM282[一般工业技术—材料科学与工程]