红外高能激光分色镜的初步研究  

The Preliminarg Study on High Power CO_2 Laser Split-Color Element

作　　者：高劲松[1] 

机构地区：[1]中国科学院长春光学精密机械研究所,长春130022

出　　处：《光学精密工程》1993年第5期36-40,共5页Optics and Precision Engineering

摘　　要：本文主要介绍了利用PVD方法研究制透可见及近红外(1.064μm)、反10.6μm的分色镜的初步研究。采用金属—介质组合膜方案设计分色镜的膜系,对金属及介质材料进行优选,设计并采用可行的镀制工艺和镀后处理工艺。所制得的分色镜在光学性能,激光阈值,机械强度及化学稳定性等方面获得了比较理想的效果。The Paper describes the primary research about the visible light-transmited and 10.6um-reflectd split-cotlor element by PVD method. The technique of the metal-media op-ticl coating is used, what is more, the techniques of the advanced coating and deposing after coating are applied, the split-cotlor element was made and produced a satisfatory result, in the repects of the optical character, the mechanical intensity, the energy density at threshold and stability.

关 键 词：激光分色镜 分色镜 PVD方法 膜系 

分 类 号：TH744.5[机械工程—光学工程]