微平面机构的结构设计与制造  

Structure Design and Fabrication of the Micro-plane Mechanism

作　　者：李伟[1] 陆景唐 季超仁 宋汉斌 董鸣 蔡建中 

机构地区：[1]上海科学技术大学精密机械系,上海201800

出　　处：《光学精密工程》1993年第6期34-39,共6页Optics and Precision Engineering

摘　　要：本文通过微平面机构的设计制造和测试研究,提出了一整套行之有效的工艺方法,所制造的微机构运动自如,文章还进一步探讨了有关运动、动力、摩擦等方面的问题。By the design, fabrication and testing of many Micro-plane mechanisms, we have advanced a successful technological process and fabricated many micro-mechanisms which can move freely. We have further studied the problems about the kinematics, dynamics and friction of the mechanism.

关 键 词：微机构 工艺 微平面机构 集成电路 

分 类 号：TH112.1[机械工程—机械设计及理论]