无团聚HfO_2纳米粉体的湿化学法制备及性能表征  

Preparation and Property Characteristics of Non-agglomerated HfO_2 Nano Powders by Wet Chemical Method

作　　者：吴智华[1] 蒋丹宇[2] 刘健敏[1] 吉亚明[2] 史伟民[1] 张骋[1] 

机构地区：[1]上海大学电子信息材料系,上海201800 [2]中国科学院上海硅酸盐研究所,上海200050

出　　处：《无机材料学报》2004年第5期970-976,共7页Journal of Inorganic Materials

摘　　要：以化学沉淀法制备HfO2纳米粉体,借助XRD、SEM、TEM、BET、激光粒度测试仪等测试方法研究了不同制备工艺对HfO2纳米粉料团聚状态的影响.采用初始浓度0.5mol/L的溶液,稳定溶液pH为9、添加表面活性剂PEG、用无水乙醇处理水洗后的湿凝胶、在700℃下煅烧,能制备无团聚,平均粒径为25nm,呈正交晶型的HfO2纳米粉体.200MPa冷等静压成型的素坯在氢气中1800℃C保温2h得到96％理论密度的主相为正交相,有少量单斜相存在的HfO2陶瓷烧结体.HfO2 nano powders were prepared by the chemical precipitant method. The influence of different preparation parameters on the agglomeration was investigated by X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), BET surface area techniques and laser particle analyzer. Non-agglomerated orthorhombic, HfO2 powders with a size of about 25nm can be obtained by controlling starting concentration and pH values of solution, adding surfactants, washing gels with alcohol and calcining at 700degreesC. Orthorhombic HfO2 ceramics of 96% theoretical density can be prepared by sintering at 1800degreesC for 2h in hydrogen. The results show that there are both o-HfO2 and m-HfO2 in the sample, mainly o-HfO2.

关 键 词：化学沉淀法 HfO2纳米粉体 团聚体 烧结 

分 类 号：TB383[一般工业技术—材料科学与工程] TF12[冶金工程—粉末冶金]